Effect of post-deposition annealing on the interfacial...

Effect of post-deposition annealing on the interfacial chemical bonding states and band alignment of atomic layer deposited neodymium oxide on silicon

Fan, Xiaojiao, Liu, Hongxia, Fei, Chenxi
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Volume:
1
Language:
english
Journal:
Materials Research Express
DOI:
10.1088/2053-1591/1/4/045005
Date:
October, 2014
File:
PDF, 603 KB
english, 2014
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