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Influence of Radio-Frequecy Power on Structural and Electrical Properties of Sputtered Hafnium Dioxide Thin Films
Wen-Ting, Liu, Zheng-Tang, Liu, Ting-Ting, Tan, Feng, YanVolume:
27
Language:
english
Journal:
Chinese Physics Letters
DOI:
10.1088/0256-307X/27/2/027703
Date:
February, 2010
File:
PDF, 603 KB
english, 2010