Molecular Dynamical Simulations on a-C:H Film Growth from C and H Atomic Flux: Effect of Incident Energy
Wei-Long, Quan, Hong-Xuan, Li, Fei, Zhao, Li, Ji, Wen, Du, Hui-Di, Zhou, Jian-Min, ChenVolume:
27
Language:
english
Journal:
Chinese Physics Letters
DOI:
10.1088/0256-307X/27/8/088102
Date:
August, 2010
File:
PDF, 2.04 MB
english, 2010