A Novel Model of the H Radical in Hot-Filament Chemical...

Chinese Physics Letters 2011 / 02 Vol. 28; Iss. 2

A Novel Model of the H Radical in Hot-Filament Chemical Vapor Deposition

Guo, Xiao-Song, Bao, Zhong, Zhang, Shan-Shan, Xie, Er-Qing
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Volume:
28
Language:
english
Journal:
Chinese Physics Letters
DOI:
10.1088/0256-307X/28/2/028101
Date:
February, 2011
File:
PDF, 1.13 MB
english, 2011
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