High-Response X-Y Stage System Driven by In-Parallel Linear...

High-Response X-Y Stage System Driven by In-Parallel Linear Motors

Yoshiyuki Tomita, Kenichi Makino, Masanobu Sugimine, N. Taniguchi
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Volume:
45
Year:
1996
Language:
english
Pages:
4
DOI:
10.1016/s0007-8506(07)63080-7
File:
PDF, 519 KB
english, 1996
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