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An Ultra-High Q Silicon Cantilever Resonator for Thin Film Internal Friction and Young's Modulus Measurements
Metcalf, Thomas H., Liu, XiaoVolume:
184
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.184.325
Date:
January, 2012
File:
PDF, 1.81 MB
english, 2012