Three-Dimensional Characterization of Deuterium Implanted...

Applied Physics Express 2013 / 06 Vol. 6; Iss. 6

Three-Dimensional Characterization of Deuterium Implanted in Silicon Using Atom Probe Tomography

Takamizawa, Hisashi, Hoshi, Katsuya, Shimizu, Yasuo, Yano, Fumiko, Inoue, Koji, Nagata, Shinji, Shikama, Tatsuo, Nagai, Yasuyoshi
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Volume:
6
Language:
english
Journal:
Applied Physics Express
DOI:
10.7567/APEX.6.066602
Date:
June, 2013
File:
PDF, 513 KB
english, 2013
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