Uniformity of Plasma Density and Film Thickness of Coatings...

Plasma Science and Technology 2008 / 10 Vol. 10; Iss. 5

Uniformity of Plasma Density and Film Thickness of Coatings Deposited Inside a Cylindrical Tube by Radio Frequency Sputtering

Jiangtao, Cui, Xiubo, Tian, Shiqin, Yang, Tao, Hu, Fu, Ricky K. Y, Chu, Paul K
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Volume:
10
Language:
english
Journal:
Plasma Science and Technology
DOI:
10.1088/1009-0630/10/5/08
Date:
October, 2008
File:
PDF, 669 KB
english, 2008
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