Piezoelectrically operated MEMS corner cube retroreflector...

Piezoelectrically operated MEMS corner cube retroreflector for optical communications

Park, J, Won, J, Kim, D, Jo, M-S, Park, J Y
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Volume:
22
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/22/5/055007
Date:
May, 2012
File:
PDF, 1.03 MB
english, 2012
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