Influence of nitrogen implantation into the buried oxide on...

Chinese Physics B 2010 / 10 Vol. 19; Iss. 10

Influence of nitrogen implantation into the buried oxide on the radiation hardness of silicon-on-insulator wafers

Hai-Ma, Tang, Zhong-Shan, Zheng, En-Xia, Zhang, Fang, Yu, Ning, Li, Ning-Juan, Wang
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
19
Language:
english
Journal:
Chinese Physics B
DOI:
10.1088/1674-1056/19/10/106106
Date:
October, 2010
File:
PDF, 1.24 MB
english, 2010
Conversion to is in progress
Conversion to is failed