Development of a 3D-AFM for true 3D measurements of...

Measurement Science and Technology 2011 / 09 Vol. 22; Iss. 9

Development of a 3D-AFM for true 3D measurements of nanostructures

Dai, Gaoliang, Häßler-Grohne, Wolfgang, Hüser, Dorothee, Wolff, Helmut, Danzebrink, Hans-Ulrich, Koenders, Ludger, Bosse, Harald
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Volume:
22
Language:
english
Journal:
Measurement Science and Technology
DOI:
10.1088/0957-0233/22/9/094009
Date:
September, 2011
File:
PDF, 324 KB
english, 2011
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