Reliability Evaluation of Al 2...

Japanese Journal of Applied Physics 2013 / 08 Vol. 52; Iss. 8S

Reliability Evaluation of Al 2 O 3 Deposited by Ozone-Based Atomic Layer Deposition on Dry-Etched n-Type GaN

Kikuta, Daigo, Narita, Tetsuo, Kutsuki, Katsuhiro, Uesugi, Tsutomu, Kachi, Tetsu
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Volume:
52
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.52.08JN19
Date:
August, 2013
File:
PDF, 324 KB
english, 2013
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