A master-mold fabrication by electron beam lithography...

Japanese Journal of Applied Physics 2014 / 06 Vol. 53; Iss. 6S

A master-mold fabrication by electron beam lithography followed by nanoimprinting and self-aligned double patterning

Watanabe, Tsuyoshi, Suzuki, Kouta, Iyama, Hiromasa, Kagatsume, Takeshi, Kishimoto, Shuji, Sato, Takashi, Kobayashi, Hideo
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Volume:
53
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.53.06JK05
Date:
June, 2014
File:
PDF, 1.03 MB
english, 2014
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