Effect of the Surface Temperature on Formation of...

Japanese Journal of Applied Physics 2005 / 5 Vol. 44; Iss. 5A

Effect of the Surface Temperature on Formation of Low-Temperature Phase in Magnetron-Sputtered Chromium Films

Shaginyan, Leonid R., Han, Jeon Geon, Britun, Nikolay V.
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Volume:
44
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.44.3200
Date:
May, 2005
File:
PDF, 112 KB
english, 2005
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