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A monitoring instrument with capacitive porous silicon humidity sensors
Rittersma, Z M, Zaagman, W J, Zetstra, M, Benecke, WVolume:
9
Language:
english
Journal:
Smart Materials and Structures
DOI:
10.1088/0964-1726/9/3/316
Date:
June, 2000
File:
PDF, 1.40 MB
english, 2000