Electrical Reliability Challenges of Advanced Low-k Dielectrics
Wu, C., Li, Y., Baklanov, M. R., Croes, K.Volume:
4
Language:
english
Journal:
ECS Journal of Solid State Science and Technology
DOI:
10.1149/2.0091501jss
Date:
October, 2014
File:
PDF, 885 KB
english, 2014