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Influence of working pressure on the structural, optical and electrical properties of sputter deposited AZO thin films
Park, Hyeongsik, Qamar Hussain, S., Velumani, S., Tuan Le, Anh Huy, Ahn, Shihyun, Kim, Sunbo, Yi, JunsinVolume:
37
Language:
english
Journal:
Materials Science in Semiconductor Processing
DOI:
10.1016/j.mssp.2014.12.076
Date:
September, 2015
File:
PDF, 3.11 MB
english, 2015