Photodefinable Metal Oxide Dielectrics II: Direct...

MRS Proceedings 2004 / 1 Vol. 833

Photodefinable Metal Oxide Dielectrics II: Direct Fabrication of Patterned High-k Dielectrics for Low Cost RF Capacitive MEMS Switches

Romeo, Michael, Finger, Isaac, Jeyakumar, Augustin, Wang, Guoan, Papapolymerou, John, Henderson, Clifford L.
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Volume:
833
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-833-G6.3
Date:
January, 2004
File:
PDF, 100 KB
english, 2004
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