Electron-beam and ion-beam-induced deposited tungsten...

Nanotechnology 2014 / 09 Vol. 25; Iss. 37

Electron-beam and ion-beam-induced deposited tungsten contacts for carbon nanofiber interconnects

Wilhite, Patrick, Soo Uh, Hyung, Kanzaki, Nobuhiko, Wang, Phillip, Vyas, Anshul, Maeda, Shusaku, Yamada, Toshishige, Yang, Cary Y
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Volume:
25
Language:
english
Journal:
Nanotechnology
DOI:
10.1088/0957-4484/25/37/375702
Date:
September, 2014
File:
PDF, 2.64 MB
english, 2014
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