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Chemical mechanical polishing of freestanding GaN substrates
Huaiyue, Yan, Xiangqian, Xiu, Zhanhui, Liu, Rong, Zhang, Xuemei, Hua, Zili, Xie, Ping, Han, Yi, Shi, Youdou, ZhengVolume:
30
Language:
english
Journal:
Journal of Semiconductors
DOI:
10.1088/1674-4926/30/2/023003
Date:
February, 2009
File:
PDF, 78 KB
english, 2009