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MEMS Microresonators Based on Nanocrystalline Silicon
Gaspar, J., Adrega, T., Chu, V., Conde, J. P.Volume:
808
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-808-A10.9
Date:
January, 2004
File:
PDF, 706 KB
english, 2004