Fast equilibration of silane/hydrogen plasmas in large area...

Plasma Sources Science and Technology 2007 / 11 Vol. 16; Iss. 4

Fast equilibration of silane/hydrogen plasmas in large area RF capacitive reactors monitored by optical emission spectroscopy

Howling, A A, Strahm, B, Colsters, P, Sansonnens, L, Hollenstein, Ch
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Volume:
16
Language:
english
Journal:
Plasma Sources Science and Technology
DOI:
10.1088/0963-0252/16/4/001
Date:
November, 2007
File:
PDF, 1.35 MB
english, 2007
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