Surface graft polymerization of SU-8 for bio-MEMS applications
Wang, Yuli, Pai, Jeng-Hao, Lai, Hsuan-Hong, Sims, Christopher E, Bachman, Mark, Li, G P, Allbritton, Nancy LVolume:
17
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/17/7/020
Date:
July, 2007
File:
PDF, 733 KB
english, 2007