An EpoClad/EpoCore-based platform for MOEMS fabrication

Journal of Micromechanics and Microengineering 2013 / 12 Vol. 23; Iss. 12

An EpoClad/EpoCore-based platform for MOEMS fabrication

Guan, Tiannan, Ceyssens, Frederik, Puers, Robert
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Volume:
23
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/23/12/125005
Date:
December, 2013
File:
PDF, 2.80 MB
english, 2013
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