Defect-Free Planarization of 4H–SiC(0001) Substrate Using Reference Plate
Yagi, Keita, Murata, Junji, Kubota, Akihisa, Sano, Yasuhisa, Hara, Hideyuki, Arima, Kenta, Okamoto, Takeshi, Mimura, Hidekazu, Yamauchi, KazutoVolume:
47
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.47.104
Date:
January, 2008
File:
PDF, 1.23 MB
english, 2008