Fourier analysis of blurred images for the measurement of the in-plane dynamics of MEMS
Ellerington, Neil, Bschaden, Ben, Hubbard, Ted, Kujath, MarekVolume:
22
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/22/3/035019
Date:
March, 2012
File:
PDF, 448 KB
english, 2012