Development of an In situ Infrared Spectroscopic...

Development of an In situ Infrared Spectroscopic Measurement of Plasma-Induced Reactions in Ethanol

Shinohara, Masanori, Fuakae, Akihiro, Amano, Katsuhiro, Yoshida, Yuta, Matsuda, Yoshinobu, Fujiyama, Hiroshi
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Volume:
52
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.52.11NC06
Date:
November, 2013
File:
PDF, 1.35 MB
english, 2013
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