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Understanding of Initial Unstable Contact Behaviors of Au-to-Au Microcontact under Low Contact Force for Micro- and Nano-Electromechanical System Devices
Qiu, Haodong, Wang, Hong, Ke, FeixiangVolume:
52
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.52.090203
Date:
September, 2013
File:
PDF, 412 KB
english, 2013