Integrated micro ring resonator displacement sensor for scanning probe microscopies
Kiyat, Isa, Kocabas, Coskun, Aydinli, AtillaVolume:
14
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/14/3/009
Date:
March, 2004
File:
PDF, 76 KB
english, 2004