A single-mask thermal displacement sensor in MEMS

Journal of Micromechanics and Microengineering 2011 / 07 Vol. 21; Iss. 7

A single-mask thermal displacement sensor in MEMS

Krijnen, B, Hogervorst, R P, van Dijk, J W, Engelen, J B C, Woldering, L A, Brouwer, D M, Abelmann, L, Soemers, H M J R
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
21
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/21/7/074007
Date:
July, 2011
File:
PDF, 529 KB
english, 2011
Conversion to is in progress
Conversion to is failed