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A single-mask thermal displacement sensor in MEMS
Krijnen, B, Hogervorst, R P, van Dijk, J W, Engelen, J B C, Woldering, L A, Brouwer, D M, Abelmann, L, Soemers, H M J RVolume:
21
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/21/7/074007
Date:
July, 2011
File:
PDF, 529 KB
english, 2011