![](/img/cover-not-exists.png)
Aluminum doping of 4H-SiC by irradiation of excimer laser in aluminum chloride solution
Marui, Daichi, Ikeda, Akihiro, Nishi, Koji, Ikenoue, Hiroshi, Asano, TanemasaVolume:
53
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.53.06JF03
Date:
June, 2014
File:
PDF, 1.35 MB
english, 2014