Decomposition of Nitrogen Trifluoride Using Low Power Arc...

Plasma Science and Technology 2013 / 09 Vol. 15; Iss. 9

Decomposition of Nitrogen Trifluoride Using Low Power Arc Plasma

Ko, Jee-Hun, Choi, Sooseok, Park, Hyun-Woo, Park, Dong-Wha
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Volume:
15
Language:
english
Journal:
Plasma Science and Technology
DOI:
10.1088/1009-0630/15/9/17
Date:
September, 2013
File:
PDF, 226 KB
english, 2013
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