Investigation of wave emission phenomena in dual frequency...

Investigation of wave emission phenomena in dual frequency capacitive discharges using particle-in-cell simulation

Sharma, S, Turner, M M
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Volume:
47
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/47/28/285201
Date:
July, 2014
File:
PDF, 481 KB
english, 2014
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