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The challenge of revealing and tailoring the dynamics of radio-frequency plasmas
Gans, T, O'Connell, D, Schulz-von der Gathen, V, Waskoenig, JVolume:
19
Language:
english
Journal:
Plasma Sources Science and Technology
DOI:
10.1088/0963-0252/19/3/034010
Date:
June, 2010
File:
PDF, 774 KB
english, 2010