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Effect of Sensing Film Thickness on Drift Phenomenon of Capacitive-Type Humidity Sensors
Matsuguchi, Masanobu, Takahashi, Yasunori, Kuroiwa, Takaaki, Ogura, Tsutomu, Obara, Sachiko, Sakai, YoshiroVolume:
150
Year:
2003
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.1592522
File:
PDF, 76 KB
english, 2003