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Breakdown Modes and Their Evolution in Ultrathin Gate Oxide
Lin, Horng-Chih, Lee, Da-Yuan, Huang, Tiao-YuanVolume:
41
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.41.5957
Date:
October, 2002
File:
PDF, 1.46 MB
english, 2002