A MEMS Silicon-based Piezoelectric AC Current Sensor

Procedia Engineering 2014 Vol. 87

Olszewski, Oskar Zbigniew, Houlihan, Ruth, O’Keeffe, Rosemary, O’Neill, Mike, Waldron, Finbarr, Mathewson, Alan, Jackson, Nathan

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Volume:

Year:

2014

Language:

english

Journal:

Procedia Engineering

DOI:

10.1016/j.proeng.2014.11.724

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PDF, 819 KB

english, 2014

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