Experiment and modelling of very low frequency oscillations...

Plasma Sources Science and Technology 2008 / 08 Vol. 17; Iss. 3

Experiment and modelling of very low frequency oscillations in RF-PECVD: a signature for nanocrystal dynamics

Johnson, E V, Djeridane, Y, Abramov, A, Roca i Cabarrocas, P
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Volume:
17
Language:
english
Journal:
Plasma Sources Science and Technology
DOI:
10.1088/0963-0252/17/3/035029
Date:
August, 2008
File:
PDF, 1.48 MB
english, 2008
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