SiC epitaxial layers grown by chemical vapour deposition...

SiC epitaxial layers grown by chemical vapour deposition and the fabrication of Schottky barrier diodes

Yue-Hu, Wang, Yi-Men, Zhang, Yu-Ming, Zhang, Lin, Zhang, Ren-Xu, Jia, Da, Chen
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Volume:
19
Language:
english
Journal:
Chinese Physics B
DOI:
10.1088/1674-1056/19/3/036803
Date:
March, 2010
File:
PDF, 1.62 MB
english, 2010
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