Etching characteristics of Pb(Zr,Ti)O 3...

Etching characteristics of Pb(Zr,Ti)O 3 , Pt, SiO 2 and Si 3 N 4 in an inductively coupled HBr/Ar plasma

Efremov, Alexander, Min, Nam Ki, Jeong, Jaehwa, Kim, Youngkeun, Kwon, Kwang-Ho
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Volume:
19
Language:
english
Journal:
Plasma Sources Science and Technology
DOI:
10.1088/0963-0252/19/4/045020
Date:
August, 2010
File:
PDF, 452 KB
english, 2010
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