Thermal crosstalk in heated microcantilever arrays
Kim, Hoe Joon, Dai, Zhenting, King, William PVolume:
23
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/23/2/025001
Date:
February, 2013
File:
PDF, 486 KB
english, 2013