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Reactive Ion Etching of Co–Zr–Nb Thin Film Using B C l 3
Ichihara, Katsutaro, Hara, MichikoVolume:
36
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.36.4874
Date:
July, 1997
File:
PDF, 980 KB
1997