Analysis and finite element simulation of electromagnetic heating in the nitride MOCVD reactor
Zhi-Ming, Li, Yue, Hao, Jin-Cheng, Zhang, Sheng-Rui, Xu, Jin-Yu, Ni, Xiao-Wei, ZhouVolume:
18
Language:
english
Journal:
Chinese Physics B
DOI:
10.1088/1674-1056/18/11/077
Date:
November, 2009
File:
PDF, 788 KB
english, 2009