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Nanostructured Membranes for MEMS Energy Harvester
Mousselmal, H.D., Remaki, B., Malhaire, C., Petit, L.Volume:
543
Language:
english
Journal:
Key Engineering Materials
DOI:
10.4028/www.scientific.net/KEM.543.208
Date:
March, 2013
File:
PDF, 663 KB
english, 2013