Dielectric Recovery of Plasma Damaged Organosilicate Low-k...

MRS Proceedings 2008 / 1 Vol. 1079

Dielectric Recovery of Plasma Damaged Organosilicate Low-k Films

Huang, Huai, Bao, Junjing, Huang, Huai, Liu, Junjun, Smith, Ryan Scott, Sun, Yangming, Ho, Paul S., McSwiney, Michael L., Moinpour, Mansour, Kloster, Grant M
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Volume:
1079
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-1079-N02-10
Date:
January, 2008
File:
PDF, 2.09 MB
english, 2008
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