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Deflection Reduction of GaN Wafer Bowing by Coating or Cutting Grooves in the Substrates
Sun, Tao, Wang, Ming-Qing, Sun, Yong-Jian, Wang, Bo-Ping, Zhang, Guo-Yi, Tong, Yu-Zhen, Duan, Hui-LingVolume:
28
Language:
english
Journal:
Chinese Physics Letters
DOI:
10.1088/0256-307X/28/4/047303
Date:
April, 2011
File:
PDF, 454 KB
english, 2011