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Simple uncertainty evaluation method for an interferometric flatness measurement machine using a calibrated test flat
Bitou, Youichi, Takatsuji, Toshiyuki, Ehara, KenseiVolume:
45
Language:
english
Journal:
Metrologia
DOI:
10.1088/0026-1394/45/1/004
Date:
February, 2008
File:
PDF, 4.36 MB
english, 2008