Effects of Titanium Sputtering Current on Structure and...

Materials Sciences and Applications 2013 Vol. 4; Iss. 11

Effects of Titanium Sputtering Current on Structure and Morphology of TiZrN Films Prepared by Reactive DC Magnetron Co-Sputtering

Chinsakolthanakorn, Somchai, Buranawong, Adisorn, Chiyakun, Surasing, Limsuwan, Pichet
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Volume:
4
Year:
2013
Language:
english
Journal:
Materials Sciences and Applications
DOI:
10.4236/msa.2013.411086
File:
PDF, 1.45 MB
english, 2013
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