Trans-RP Gettering and Out-Diffusion of Oxygen Implanted...

Solid State Phenomena 2009 / 10 Vol. 156-158

Trans-RP Gettering and Out-Diffusion of Oxygen Implanted into Highly B-Doped Silicon

Kögler, R., Dubois, Christiane, Gerlach, Jürgen W., Hutter, H., Mücklich, A., Skorupa, Wolfgang
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Volume:
156-158
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.156-158.375
Date:
October, 2009
File:
PDF, 244 KB
english, 2009
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