Hybrid laser and reactive ion etching of Parylene-C for...

Journal of Micromechanics and Microengineering 2012 / 10 Vol. 22; Iss. 10

Hybrid laser and reactive ion etching of Parylene-C for deinsulation of a Utah electrode array

Yoo, Je-Min, Song, Jong-In, Tathireddy, Prashant, Solzbacher, Florian, Rieth, Loren W
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Volume:
22
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/22/10/105036
Date:
October, 2012
File:
PDF, 424 KB
2012
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